Axcelis Technologies, Inc.
2 more in force are now held by other companies
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
Recorded under 14 name spellings.
57
Ending by 2030
Nov 2026
Next term end
When these terms end
Held patents by the year their term ends
20262027202820292030203120322033203420352036203720382039204020412042204320442045
Fee deadlines
Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
- 1 fee due Dec 23, 2026The maintenance fee for Workpiece carrier (US 9,064,673) comes due Dec 23, 2026. Unpaid by Jun 23, 2027, it lapses early.
- 5 fees due Jan 2 to 23, 2027 · next Jan 2
- 5 fees due Feb 15 to 27, 2027 · next Feb 15
- 3 fees due Mar 3 to 29, 2027 · next Mar 3
- 1 fee due Apr 24, 2027The maintenance fee for Extended Lifetime Dual Indirectly-Heated Cathode Ion Source (US 11,798,775) comes due Apr 24, 2027. Unpaid by Oct 25, 2027, it lapses early.
- 2 fees due May 19 to 21, 2027 · next May 19
- 2 fees due Jun 22 to 24, 2027 · next Jun 22
- 3 fees due Jul 12 to 30, 2027 · next Jul 12
- 4 fees due Aug 4 to 25, 2027 · next Aug 4
- 2 fees due Sep 3 to 5, 2027 · next Sep 3
- 1 fee due Oct 19, 2027The maintenance fee for Integrated extraction electrode manipulator for ion source (US 9,318,302) comes due Oct 19, 2027. Unpaid by Apr 19, 2028, it lapses early.
Recent changes
- 3 of the patents on this record were granted since Aug 16, 2026
- 5 terms have ended since Aug 16, 2026
Patents held now
Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 7,476,876 | Ion beam angle measurement systems and methods employing varied angle slot arrays for ion implantation systems In force · From the USPTO record | In force | From the USPTO record | |
| US 7,435,977 | Ion beam angle measurement systems and methods for ion implantation systems In force · From the USPTO record | In force | From the USPTO record | |
| US 7,375,355 | Ribbon beam ion implanter cluster tool In force · From the USPTO record | In force | From the USPTO record | |
| US 7,435,971 | Ion source In force · From the USPTO record | In force | From the USPTO record | |
| US 7,381,969 | Load lock control In force · From the USPTO record | In force | From the USPTO record | |
| US 7,511,287 | Systems and methods that mitigate contamination and modify surface characteristics during ion implantation processes through the introduction of gases In force · From the USPTO record | In force | From the USPTO record | |
| US 7,417,242 | Method of measuring ion beam position In force · From the USPTO record | In force | From the USPTO record | |
| US 7,507,977 | System and method of ion beam control in response to a beam glitch In force · From the USPTO record | In force | From the USPTO record | |
| US 7,507,978 | Beam line architecture for ion implanter In force · From the USPTO record | In force | From the USPTO record | |
| US 7,615,763 | System for magnetic scanning and correction of an ion beam In force · From the USPTO record | In force | From the USPTO record |
Also on record, not counted in the 183: 2 patents in force now held by others · 154 lapsed for an unpaid fee · 225 ended at full term. List them
Sources and methods
Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand.
How this record was built
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
Published applications
US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.
25 pending · 9 abandoned · 36 no status recorded