Maintenance fees coming due

Beijing e-Town Semiconductor Technology, Co., Ltd.

28 maintenance fees come due in the 12 months from Nov 15, 2026, the next on Jan 11, 2027. Unpaid by Jul 12, 2027, that one lapses early.

A maintenance fee does not end a patent on its due date. It falls due at 3.5, 7.5 and 11.5 years from grant, and the patent lapses only if the fee is still unpaid at the end of the six month grace period that follows.

Patent	Title	Holder	Status	Fee due	Lapses if unpaid	Expires	Confidence
US 11,699,603	Thermal Processing System With Temperature Non-Uniformity Control Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Jan 11, 2027 Lapses if unpaid Jul 12, 2027 Term ends Jul 14, 2041 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Jan 11, 2027	Jul 12, 2027	Term ends Jul 14, 2041	High confidence
US 10,354,883	Surface Treatment of Silicon or Silicon Germanium Surfaces Using Organic Radicals Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Jan 16, 2027 Lapses if unpaid Jul 16, 2027 Term ends Apr 20, 2038 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Jan 16, 2027	Jul 16, 2027	Term ends Apr 20, 2038	High confidence
US 10,359,334	Fluid Leakage Detection for a Millisecond Anneal System Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Jan 23, 2027 Lapses if unpaid Jul 23, 2027 Term ends Jul 15, 2037 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Jan 23, 2027	Jul 23, 2027	Term ends Jul 15, 2037	High confidence
US 10,370,296	Asphalt Crack Filling System and Method of Use Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Feb 6, 2027 Lapses if unpaid Aug 6, 2027 Ends no later than Jun 29, 2037 · Low confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Feb 6, 2027	Aug 6, 2027	Ends no later than Jun 29, 2037	Low confidence
US 11,721,539	Arc Lamp With Forming Gas For Thermal Processing Systems Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology Co., Ltd. In force Fee due Feb 8, 2027 Lapses if unpaid Aug 9, 2027 Term ends Nov 23, 2041 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology Co., Ltd.	In force	Feb 8, 2027	Aug 9, 2027	Term ends Nov 23, 2041	High confidence
US 9,111,970	Apparatus for the Heat Treatment of Disc Shaped Substrates Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Feb 18, 2027 Lapses if unpaid Aug 18, 2027 Term ends Jan 22, 2033 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Feb 18, 2027	Aug 18, 2027	Term ends Jan 22, 2033	High confidence
US 10,388,552	Substrate Breakage Detection in a Thermal Processing System Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Feb 20, 2027 Lapses if unpaid Aug 20, 2027 Term ends Dec 13, 2036 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Feb 20, 2027	Aug 20, 2027	Term ends Dec 13, 2036	High confidence
US 10,403,492	Integration Of Materials Removal And Surface Treatment In Semiconductor Device Fabrication Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Mar 3, 2027 Lapses if unpaid Sep 3, 2027 Term ends Apr 20, 2038 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Mar 3, 2027	Sep 3, 2027	Term ends Apr 20, 2038	High confidence
US 11,749,509	Temperature Control Using Temperature Control Element Coupled to Faraday Shield Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Mar 5, 2027 Lapses if unpaid Sep 7, 2027 Term ends Jan 16, 2040 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Mar 5, 2027	Sep 7, 2027	Term ends Jan 16, 2040	High confidence
US 11,764,072	Method for Processing a Workpiece Using a Multi-Cycle Thermal Treatment Process Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd. In force Fee due Mar 19, 2027 Lapses if unpaid Sep 20, 2027 Term ends Jun 27, 2038 · High confidence	Mattson Technology, Inc. and Beijing e-Town Semiconductor Technology, Co., Ltd.	In force	Mar 19, 2027	Sep 20, 2027	Term ends Jun 27, 2038	High confidence
18 more maintenance fees coming due in the 12 months from Nov 15, 2026 · Pro

10 of 28 patents shown. Soonest fee due date first, then patent number.

Pro members see every patent with a maintenance fee coming due: number, title, status, the due date, and the date it lapses if the fee goes unpaid through the grace period.

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Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.