Bruker Technologies Ltd.
6 more in force are now held by other companies
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
9
Ending by 2030
Mar 2027
Next term end
When these terms end
Held patents by the year their term ends
20262027202820292030203120322033203420352036203720382039204020412042204320442045
Fee deadlines
Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
- 1 fee due Jan 18, 2027The maintenance fee for Small-angle x-ray scatterometry (US 11,703,464) comes due Jan 18, 2027. Unpaid by Jul 19, 2027, it lapses early.
- 1 fee due Feb 20, 2027The maintenance fee for Closed-loop control of X-ray knife edge (US 10,386,313) comes due Feb 20, 2027. Unpaid by Aug 20, 2027, it lapses early.
- 1 fee due Mar 19, 2027The maintenance fee for Transmission X-ray critical dimension (T-XCD) characterization of shift and tilt of stacks of high-aspect-ratio (HAR) structures (US 11,761,913) comes due Mar 19, 2027. Unpaid by Sep 20, 2027, it lapses early.
- 1 fee due Apr 10, 2027The maintenance fee for Spot-size control in reflection-based and scatterometry-based X-ray metrology systems (US 11,781,999) comes due Apr 10, 2027. Unpaid by Oct 12, 2027, it lapses early.
- 1 fee due Aug 23, 2027The maintenance fee for X-ray beam conditioning (US 9,269,468) comes due Aug 23, 2027. Unpaid by Feb 23, 2028, it lapses early.
- 1 fee due Oct 28, 2027The maintenance fee for X-ray fluorescence apparatus for contamination monitoring (US 10,634,628) comes due Oct 28, 2027. Unpaid by Apr 28, 2028, it lapses early.
Recent changes
- 3 terms have ended since Aug 16, 2026
Patents held now
Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 7,481,579 | Overlay Metrology Using X-Rays In force · High confidence | In force | High confidence | |
| US 7,649,978 | Automated selection of X-ray reflectometry measurement locations In force · From the USPTO record | In force | From the USPTO record | |
| US 7,990,549 | Method and apparatus for optically measuring periodic structures using orthogonal azimuthal sample orientation In force · From the USPTO record | In force | From the USPTO record | |
| US 7,653,174 | Inspection of Small Features Using X-Ray Fluorescence In force · High confidence | In force | High confidence | |
| US 7,680,243 | X-ray measurement of properties of nano-particles In force · From the USPTO record | In force | From the USPTO record | |
| US 7,948,631 | Method and apparatus for using multiple relative reflectance measurements to determine properties of a sample using vacuum ultra violet wavelengths In force · From the USPTO record | In force | From the USPTO record | |
| US 8,731,138 | High-resolution X-ray diffraction measurement with enhanced sensitivity In force · From the USPTO record | In force | From the USPTO record | |
| US 8,153,987 | Automated calibration methodology for VUV metrology system In force · From the USPTO record | In force | From the USPTO record | |
| US 8,243,878 | High-resolution X-ray diffraction measurement with enhanced sensitivity In force · From the USPTO record | In force | From the USPTO record | |
| US 8,437,450 | Fast measurement of X-ray diffraction from tilted layers In force · From the USPTO record | In force | From the USPTO record |
Also on record, not counted in the 45: 6 patents in force now held by others · 2 lapsed for an unpaid fee · 47 ended at full term. List them
Sources and methods
Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand.
How this record was built
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
Published applications
US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.
3 pending