Edwards Vacuum LLC
2 more in force are now held by other companies
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
Recorded under 3 name spellings.
4
Ending by 2030
Jan 2027
Next term end
When these terms end
Held patents by the year their term ends
20262027202820292030203120322033203420352036203720382039204020412042204320442045
Fee deadlines
Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
- 1 fee due Jan 18, 2027The maintenance fee for Semiconductor system with steam generator and reactor (US 11,705,345) comes due Jan 18, 2027. Unpaid by Jul 19, 2027, it lapses early.
- 1 fee due Feb 22, 2027The maintenance fee for Pneumatic drive cryocooler (US 11,732,931) comes due Feb 22, 2027. Unpaid by Aug 23, 2027, it lapses early.
- 1 fee due Apr 17, 2027The maintenance fee for Liquid filter apparatus for gas/solid separation for semiconductor processes (US 11,786,858) comes due Apr 17, 2027. Unpaid by Oct 18, 2027, it lapses early.
- 1 fee due Jun 3, 2027The maintenance fee for Cryopump Hybrid Frontal Array (US 10,495,079) comes due Jun 3, 2027. Unpaid by Dec 3, 2027, it lapses early.
- 2 fees due Aug 4 to 23, 2027 · next Aug 4
- 1 fee due Sep 19, 2027The maintenance fee for Waste Gas Abatement Technology for Semiconductor Processing (US 11,931,682) comes due Sep 19, 2027. Unpaid by Mar 20, 2028, it lapses early.
- 1 fee due Oct 28, 2027The maintenance fee for Multi-Refrigerator High Speed Cryopump (US 10,632,399) comes due Oct 28, 2027. Unpaid by Apr 28, 2028, it lapses early.
Recent changes
- 2 of the patents on this record were granted since Aug 17, 2026
Patents held now
Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 7,490,483 | Efficient Heat Exchanger for Refrigeration Process In force · High confidence | In force | High confidence | |
| US 7,850,432 | Ion Pump Having Emission Containment In force · High confidence | In force | High confidence | |
| US 8,413,452 | Linear Drive Cryogenic Refrigerator In force · High confidence | In force | High confidence | |
| US 8,082,741 | Integral Facet Cryopump, Water Vapor Pump, or High Vacuum Pump In force · High confidence | In force | High confidence | |
| US 8,636,019 | In-situ removal of semiconductor process residues from dry pump surfaces In force · From the USPTO record | In force | From the USPTO record | |
| US 11,215,384 | System and Method for Cryogenic Cooling In force · High confidence | In force | High confidence | |
| US 9,567,988 | Cryogenic Pump Employing Tin-Gallium Alloys and Methods of Use In force · High confidence | In force | High confidence | |
| US 9,926,919 | Cryopump In force · Medium confidence | In force | Medium confidence | |
| US 10,632,399 | Multi-Refrigerator High Speed Cryopump In force · Medium confidence | In force | Medium confidence | |
| US 8,382,909 | Use of spectroscopic techniques to monitor and control reactant gas input into a pre-pump reactive gas injection system In force · From the USPTO record | In force | From the USPTO record |
Also on record, not counted in the 50: 2 patents in force now held by others · 32 lapsed for an unpaid fee · 104 ended at full term · 1 past the fee grace period · 1 surrendered on reissue. List them
Sources and methods
Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand.
How this record was built
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
Published applications
US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.
7 pending · 3 abandoned · 15 no status recorded