The Patent Finder

ESOL, Inc.

11 patents currently held · Updated Nov 14, 2026
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
0
Ending by 2030
Nov 2041
Next term end

When these terms end

Held patents by the year their term ends
20262027202820292030203120322033203420352036203720382039204020412042204320442045

Fee deadlines

Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
  • 2 fees due May 14 to 28, 2027 · next May 14
  • 1 fee due Aug 13, 2027
    The maintenance fee for EUV mask inspection device using multilayer reflection zone plate (US 11,898,970) comes due Aug 13, 2027. Unpaid by Feb 14, 2028, it lapses early.

Which patents, and when each one lapses · Pro

Recent changes

  • 1 of the patents on this record was granted since Aug 16, 2026

Patents held now

Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.
PatentTitleStatus Expires Confidence
US 11,619,876System of Inspecting Pattern Defect in Scanning-Type Reflective Extreme Ultraviolet Mask
In force
 · High confidence
In forceHigh confidence
US 11,561,467Reflectivity and transmittance measuring device of EUV mask and EUV pellicle
In force
 · From the USPTO record
In forceFrom the USPTO record
US 11,829,064EUV lighting device using multilayer reflection zone plate and manufacturing method thereof
In force
 · From the USPTO record
In forceFrom the USPTO record
US 11,740,552Pellicle Structure for Euv Lithography and Manufacturing Method Therefor
In force
 · High confidence
In forceHigh confidence
US 11,817,230Device for EUV light source
In force
 · From the USPTO record
In forceFrom the USPTO record
US 11,898,970EUV mask inspection device using multilayer reflection zone plate
In force
 · From the USPTO record
In forceFrom the USPTO record
US 12,287,579High-performance EUV microscope device with free-form illumination system structure having elliptical mirror
In force
 · From the USPTO record
In forceFrom the USPTO record
US 12,282,144High-performance EUV microscope device with free-form illumination system structure
In force
 · From the USPTO record
In forceFrom the USPTO record
US 12,250,763EUV light source device and plasma gas recycling system for high-density plasma generation
In force
 · From the USPTO record
In forceFrom the USPTO record
US 12,332,188High-performance EUV microscope with free form illumination system
In force
 · From the USPTO record
In forceFrom the USPTO record
10 of 11 patents shown.
Pro members see all 11.
Pro members: see all 11 patents
Also on record, not counted in the 11: 1 lapsed for an unpaid fee. List them

Sources and methods

Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand. How this record was built
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.

Published applications

US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.

3 pending

List them

The Patent Finder CompaniesExpirationsCalculatorWatchlistPricing MethodologyCorrectionsLegalPrivacysupport@thepatentfinder.com Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) Part of 137 Finder · © 2026 137 Finder LLC · Sources cited