Euv LLC
Records under this name other than patents Euv LLC holds now: patents now held by others, patents whose terms have ended, and its applications, pending or abandoned.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 7,473,301 | Adhesive Particle Shielding Formerly held In force · High confidence | In force | High confidence | |
| US 7,740,916 | Method for the Protection of Extreme Ultraviolet Lithography Optics Formerly held In force · High confidence | In force | High confidence | |
| US 7,273,289 | Vacuum compatible, high-speed, 2-D mirror tilt stage Term ended Term ended Feb 7, 2026 · From the USPTO record | Term ended | Term ended Feb 7, 2026 | From the USPTO record |
| US 7,081,992 | Condenser Optic with Sacrificial Reflective Surface Formerly held Term ended Term ended Jun 24, 2024 · High confidence | Term ended | Term ended Jun 24, 2024 | High confidence |
| US 7,239,443 | Condenser optic with sacrificial reflective surface Term ended Term ended Jan 16, 2024 · From the USPTO record | Term ended | Term ended Jan 16, 2024 | From the USPTO record |
| US 6,888,297 | Method and Apparatus for Debris Mitigation for an Electrical Discharge Source Formerly held Term ended Term ended Jul 10, 2023 · High confidence | Term ended | Term ended Jul 10, 2023 | High confidence |
| US 6,847,463 | Method and Apparatus for Detecting the Presence and Thickness of Carbon and Oxide Layers on Euv Reflective Surfaces Formerly held Term ended Term ended Mar 19, 2023 · High confidence | Term ended | Term ended Mar 19, 2023 | High confidence |
| US 6,861,273 | Method of Fabricating Reflection-Mode Euv Diffusers Term ended Term ended Mar 3, 2023 · High confidence | Term ended | Term ended Mar 3, 2023 | High confidence |
| US 7,062,348 | Dynamic mask for producing uniform or graded-thickness thin films Term ended Term ended Mar 1, 2023 · From the USPTO record | Term ended | Term ended Mar 1, 2023 | From the USPTO record |
| US 6,867,149 | Growth of Multi-Component Alloy Films with Controlled Graded Chemical Composition on Sub-Nanometer Scale Term ended Term ended Jan 12, 2023 · High confidence | Term ended | Term ended Jan 12, 2023 | High confidence |