Evatec AG
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
7
Ending by 2030
Apr 2028
Next term end
When these terms end
Held patents by the year their term ends
20262027202820292030203120322033203420352036203720382039204020412042204320442045
Fee deadlines
Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
- 1 fee due Nov 21, 2026The maintenance fee for Adapter for vacuum-insulated lines (US 10,295,110) comes due Nov 21, 2026. Unpaid by May 21, 2027, it lapses early.
- 1 fee due Jan 9, 2027The maintenance fee for Method for Manufacturing Workpieces and Apparatus (US 10,347,515) comes due Jan 9, 2027. Unpaid by Jul 9, 2027, it lapses early.
- 2 fees due Feb 20 to 28, 2027 · next Feb 20
- 1 fee due Mar 3, 2027The maintenance fee for Chamber for degassing substrates (US 10,403,522) comes due Mar 3, 2027. Unpaid by Sep 3, 2027, it lapses early.
- 1 fee due Apr 3, 2027The maintenance fee for Chamber for Degassing Substrates (US 11,776,825) comes due Apr 3, 2027. Unpaid by Oct 4, 2027, it lapses early.
- 3 fees due Jun 15 to 29, 2027 · next Jun 15
- 1 fee due Aug 2, 2027The maintenance fee for Vacuum Treatment Apparatus and a Method for Manufacturing (US 9,252,037) comes due Aug 2, 2027. Unpaid by Feb 2, 2028, it lapses early.
- 2 fees due Sep 3 to 17, 2027 · next Sep 3
- 1 fee due Oct 9, 2027The maintenance fee for Liquid sputter target (US 11,952,654) comes due Oct 9, 2027. Unpaid by Apr 10, 2028, it lapses early.
Recent changes
- 1 of the patents on this record was granted since Aug 16, 2026
- 2 terms have ended since Aug 16, 2026
Patents held now
Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 8,491,252 | Transport Method for Disk-Shaped Workpieces In force · High confidence | In force | High confidence | |
| US 10,692,707 | RF Substrate Bias with High Power Impulse Magnetron Sputtering (HIPIMS) In force · High confidence | In force | High confidence | |
| US 11,380,530 | Reactive sputtering with HIPIMS In force · From the USPTO record | In force | From the USPTO record | |
| US 9,644,261 | Apparatus for sputtering and a method of fabricating a metallization structure In force · From the USPTO record | In force | From the USPTO record | |
| US 9,214,589 | Method of Inline Manufacturing a Solar Cell Panel In force · High confidence | In force | High confidence | |
| US 10,224,188 | RF Sputtering Arrangement In force · High confidence | In force | High confidence | |
| US 8,268,142 | RF Sputtering Arrangement In force · High confidence | In force | High confidence | |
| US 8,870,513 | Vacuum Treatment Apparatus In force · High confidence | In force | High confidence | |
| US 10,347,515 | Method for Manufacturing Workpieces and Apparatus In force · High confidence | In force | High confidence | |
| US 8,435,389 | RF Substrate Bias with High Power Impulse Magnetron Sputtering (HIPIMS) In force · High confidence | In force | High confidence |
Also on record, not counted in the 55: 26 lapsed for an unpaid fee · 18 ended at full term. List them
Sources and methods
Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand.
How this record was built
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
Published applications
US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.
3 pending · 1 abandoned · 23 no status recorded