Intevac, Inc.

32 patents currently held · Updated Nov 14, 2026

11 more in force are now held by other companies

Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.

Ending by 2030

Jul 2028

Next term end

When these terms end

5 yrs10 yrs20 yrs

Held patents by the year their term ends

20262027202820292030203120322033203420352036203720382039204020412042204320442045

Fee deadlines

Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.

1 fee due Jan 4, 2027
The maintenance fee for Hybrid System Architecture for Thin Film Deposition (US 11,694,913) comes due Jan 4, 2027. Unpaid by Jul 6, 2027, it lapses early.
1 fee due Mar 17, 2027
The maintenance fee for In line fan out system (US 10,418,260) comes due Mar 17, 2027. Unpaid by Sep 17, 2027, it lapses early.
3 fees due Apr 13 to 20, 2027 · next Apr 13
2 fees due Aug 11 to 13, 2027 · next Aug 11
3 fees due Oct 5 to 26, 2027 · next Oct 5

Which patents, and when each one lapses · Pro

Recent changes

4 terms have ended since Aug 16, 2026

Patents held now

Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.

Patent	Title	Status	Expires	Confidence
US 9,633,880	Elevator linear motor drive In force Term ends Jul 8, 2028 · From the USPTO record	In force	Term ends Jul 8, 2028	From the USPTO record
US 9,165,587	System and method for dual-sided sputter etch of substrates In force Term ends Jul 23, 2029 · From the USPTO record	In force	Term ends Jul 23, 2029	From the USPTO record
US 8,997,688	Ion Implant System Having Grid Assembly In force Term ends Jun 22, 2030 · Medium confidence	In force	Term ends Jun 22, 2030	Medium confidence
US 9,303,314	Ion implant system having grid assembly In force Term ends Jun 22, 2030 · From the USPTO record	In force	Term ends Jun 22, 2030	From the USPTO record
US 8,382,965	Tools and methods for mounting transport rails in a substrate processing system In force Term ends Feb 6, 2031 · From the USPTO record	In force	Term ends Feb 6, 2031	From the USPTO record
US 8,992,153	System and Method for Substrate Transport In force Term ends Apr 23, 2031 · High confidence	In force	Term ends Apr 23, 2031	High confidence
US 8,349,196	System and method for commercial fabrication of patterned media In force Term ends May 3, 2031 · From the USPTO record	In force	Term ends May 3, 2031	From the USPTO record
US 8,363,378	Method for optimized removal of wafer from electrostatic chuck In force Term ends Nov 2, 2031 · From the USPTO record	In force	Term ends Nov 2, 2031	From the USPTO record
US 8,795,466	System and Method for Processing Substrates with Detachable Mask In force Term ends Sep 12, 2032 · High confidence	In force	Term ends Sep 12, 2032	High confidence
US 9,034,143	Inductive/Capacitive Hybrid Plasma Source and System with Such Chamber In force Term ends Oct 4, 2032 · High confidence	In force	Term ends Oct 4, 2032	High confidence

10 of 32 patents shown.

Pro members see all 32.

Pro members: see all 32 patents

Also on record, not counted in the 32: 11 patents in force now held by others · 37 lapsed for an unpaid fee · 75 ended at full term. List them

Sources and methods

Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand. How this record was built

Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.

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Published applications

US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.

6 abandoned · 39 no status recorded

List them