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Lambda Physik AG

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Records under this name other than patents Lambda Physik AG holds now: patents now held by others, patents whose terms have ended, and its applications, pending or abandoned.

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PatentTitleStatus Expires Confidence
US 7,184,204Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
Formerly held
Term ended
Term ended Aug 11, 2025 · From the USPTO record
Term endedTerm ended Aug 11, 2025From the USPTO record
US 7,366,213MOPA excimer or molecular fluorine laser system with improved synchronization
Formerly held
Term ended
Term ended Apr 19, 2025 · From the USPTO record
Term endedTerm ended Apr 19, 2025From the USPTO record
US 7,158,553Master oscillator/power amplifier excimer laser system with pulse energy and pointing control
Formerly held
Term ended
Term ended Jan 9, 2025 · From the USPTO record
Term endedTerm ended Jan 9, 2025From the USPTO record
US 7,164,703Temperature control systems for excimer lasers
Formerly held
Term ended
Term ended Dec 26, 2024 · From the USPTO record
Term endedTerm ended Dec 26, 2024From the USPTO record
US 7,308,013Excimer or molecular fluorine laser system with precision timing
Formerly held
Term ended
Term ended Nov 18, 2024 · From the USPTO record
Term endedTerm ended Nov 18, 2024From the USPTO record
US 7,079,565Systems and methods utilizing laser discharge electrodes with ceramic spoilers
Formerly held
Term ended
Term ended Sep 30, 2024 · From the USPTO record
Term endedTerm ended Sep 30, 2024From the USPTO record
US 7,245,420Master-oscillator power-amplifier (MOPA) excimer or molecular fluorine laser system with long optics lifetime
Formerly held
Term ended
Term ended Jun 30, 2024 · From the USPTO record
Term endedTerm ended Jun 30, 2024From the USPTO record
US 6,987,790Excimer or molecular fluorine laser with several discharge chambers
Formerly held
Term ended
Term ended Feb 12, 2024 · From the USPTO record
Term endedTerm ended Feb 12, 2024From the USPTO record
US 6,993,052System and method for delay compensation for a pulsed laser
Formerly held
Term ended
Term ended Nov 30, 2023 · From the USPTO record
Term endedTerm ended Nov 30, 2023From the USPTO record
US 7,227,881Master oscillator—power amplifier excimer laser system
Term ended
Term ended Oct 30, 2023 · From the USPTO record
Term endedTerm ended Oct 30, 2023From the USPTO record
10 of 183 patents shown.
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