Micro Lithography Inc.
Records under this name other than the patents Micro Lithography Inc. holds now: patents now held by others, patents whose terms have ended, and its applications, pending or abandoned. None of them is counted in the 2 patents it holds.
Back to Micro Lithography Inc.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 6,841,317 | Vent for an optical pellicle system Term ended Term ended Aug 27, 2022 · From the USPTO record | Term ended | Term ended Aug 27, 2022 | From the USPTO record |
| US 6,566,021 | Fluoropolymer-coated photomasks for photolithography Term ended Term ended Jul 26, 2021 · From the USPTO record | Term ended | Term ended Jul 26, 2021 | From the USPTO record |
| US 6,573,980 | Removable optical pellicle Term ended Term ended Jul 26, 2021 · From the USPTO record | Term ended | Term ended Jul 26, 2021 | From the USPTO record |
| US 6,594,073 | Antistatic optical pellicle Term ended Term ended May 30, 2021 · From the USPTO record | Term ended | Term ended May 30, 2021 | From the USPTO record |
| US 6,582,859 | Dust cover for use in semiconductor fabrication Formerly held Term ended Term ended Feb 7, 2020 · From the USPTO record | Term ended | Term ended Feb 7, 2020 | From the USPTO record |
| US 6,586,159 | Method for using a coated fluoropolymer substrate pellicle in semiconductor fabrication Formerly held Term ended Term ended Feb 7, 2020 · From the USPTO record | Term ended | Term ended Feb 7, 2020 | From the USPTO record |
| US 6,280,885 | Dust cover comprising anti-reflective coating Term ended Term ended Aug 11, 2019 · From the USPTO record | Term ended | Term ended Aug 11, 2019 | From the USPTO record |
| US 6,190,743 | Photomask protection system Term ended Term ended Jul 6, 2018 · From the USPTO record | Term ended | Term ended Jul 6, 2018 | From the USPTO record |
| US 6,103,427 | Pressure relieving pellicle Lapsed on the fee record Ended Aug 15, 2008 · From the USPTO record | Lapsed on the fee record | Ended Aug 15, 2008 | From the USPTO record |
| US 4,470,508 | Dustfree packaging container and method Formerly held Term ended Term ended no later than Sep 11, 2004 · Low confidence | Term ended | Term ended no later than Sep 11, 2004 | Low confidence |