MKS Inc.
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
Previously recorded as MKS Instruments, Inc. (to 2025)
0
Ending by 2030
Nov 2040
Next term end
When these terms end
Held patents by the year their term ends
20262027202820292030203120322033203420352036203720382039204020412042204320442045
Fee deadlines
No maintenance fee falls due on this company's record before Nov 14, 2027.
Recent changes
Nothing was recorded against this company's patents in the last 90 days.
Patents held now
Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 12,700,573 | Apparatus and Tuning Method for Mitigating RF Load Impedance Variations Due to Periodic Disturbances In force · Medium confidence | In force | Medium confidence | |
| US 12,289,820 | Method and Apparatus for Impedance Matching in a Power Delivery System for Remote Plasma Generation In force · High confidence | In force | High confidence | |
| US 12,362,146 | Adaptive Pulse Shaping With Post Match Sensor In force · High confidence | In force | High confidence | |
| US 12,630,922 | Microwave System for Microwave-Assisted Surface Chemistry Annealing of ALD Processes Utilizing Microwave Radiation Energy In force · High confidence | In force | High confidence | |
| US 12,695,058 | Plasma Process Control of Multi-Electrode Systems Equipped with Ion Energy Sensors In force · High confidence | In force | High confidence | |
| US 12,500,066 | Non-Invasive IED Estimation For Pulsed-DC And Low Frequency Applications In force · High confidence | In force | High confidence | |
| US 12,592,361 | Hybrid High-Power And Broadband Variable Impedance Modules In force · High confidence | In force | High confidence | |
| US 12,480,869 | Multi-Wavelength Ozone Concentration Sensor and Method of Use In force · High confidence | In force | High confidence | |
| US 12,397,362 | GaN Clamp with Uniform Pressure In force · High confidence | In force | High confidence | |
| US 12,586,759 | Pulsed RF Plasma Generator With High Dynamic Range In force · High confidence | In force | High confidence |
Also on record, not counted in the 12: 1 lapsed for an unpaid fee. List them
Sources and methods
Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand.
How this record was built
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
Published applications
US patent applications published under this name that have not become patents. An application is published about eighteen months after its earliest filing; one that has not been published is in no public record.
3 pending