Planar Semiconductor, Inc.

9 patents currently held · Updated Nov 14, 2026

Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.

Recorded under 2 name spellings.

Ending by 2030

Jun 2027

Next term end

When these terms end

5 yrs10 yrs20 yrs

Held patents by the year their term ends

20262027202820292030203120322033203420352036203720382039204020412042204320442045

Fee deadlines

Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.

1 fee due May 28, 2027
The maintenance fee for Subnanometer-level light-based substrate cleaning mechanism (US 11,830,726) comes due May 28, 2027. Unpaid by Nov 29, 2027, it lapses early.
1 fee due Jun 1, 2027
The maintenance fee for Holding and rotary driving mechanism for flat objects (US 9,202,725) comes due Jun 1, 2027. Unpaid by Dec 1, 2027, it lapses early.
1 fee due Sep 1, 2027
The maintenance fee for Single-chamber apparatus for precision cleaning and drying of flat objects (US 9,275,849) comes due Sep 1, 2027. Unpaid by Mar 1, 2028, it lapses early.

Which patents, and when each one lapses · Pro

Recent changes

Nothing was recorded against this company's patents in the last 90 days.

Patents held now

Soonest term end first. Each date below is computed on that patent's own page, which shows the rule, the adjustments and the fee history it was derived from.

Showing 1 to 9 of 9

Patent	Title	Status	Expires	Confidence
US 9,799,536	Apparatus and method for cleaning flat objects in a vertical orientation with pulsed liquid jet In force Term ends Jun 30, 2027 · From the USPTO record	In force	Term ends Jun 30, 2027	From the USPTO record
US 9,418,831	Method for precision cleaning and drying flat objects In force Term ends Jul 30, 2027 · From the USPTO record	In force	Term ends Jul 30, 2027	From the USPTO record
US 9,202,725	Holding and rotary driving mechanism for flat objects In force Term ends Mar 6, 2029 · From the USPTO record	In force	Term ends Mar 6, 2029	From the USPTO record
US 9,275,849	Single-chamber apparatus for precision cleaning and drying of flat objects In force Term ends Jun 1, 2030 · From the USPTO record	In force	Term ends Jun 1, 2030	From the USPTO record
US 10,179,351	Method and apparatus for cleaning flat objects with pulsed liquid jet In force Term ends Jan 10, 2032 · High confidence	In force	Term ends Jan 10, 2032	High confidence
US 10,985,039	Sub-nanometer-level substrate cleaning mechanism In force Term ends Jan 30, 2038 · From the USPTO record	In force	Term ends Jan 30, 2038	From the USPTO record
US 11,069,521	Subnanometer-level light-based substrate cleaning mechanism In force Term ends Feb 5, 2038 · From the USPTO record	In force	Term ends Feb 5, 2038	From the USPTO record
US 10,892,172	Removal of process effluents In force Term ends Feb 6, 2038 · From the USPTO record	In force	Term ends Feb 6, 2038	From the USPTO record
US 11,830,726	Subnanometer-level light-based substrate cleaning mechanism In force Term ends Mar 2, 2038 · From the USPTO record	In force	Term ends Mar 2, 2038	From the USPTO record

Also on record, not counted in the 9: 1 lapsed for an unpaid fee. List them

Sources and methods

Compiled from the USPTO record, grants, published applications and recorded assignments, not yet reviewed by hand. How this record was built

Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.

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Published applications

Every application published under this name has become a patent.