Maintenance fees coming due
149 maintenance fees come due in the 12 months from Nov 14, 2026, the next on Nov 30, 2026. Unpaid by Jun 1, 2027, that one lapses early.
A maintenance fee does not end a patent on its due date. It falls due at 3.5, 7.5
and 11.5 years from grant, and the patent lapses only if the fee is still unpaid at the end of the
six month grace period that follows.
| Patent | Title | Holder | Status | Fee due | Lapses if unpaid | Expires | Confidence |
|---|---|---|---|---|---|---|---|
| US 11,664,212 | Substrate Treating Apparatus and Liquid Supplying Method In force Fee due Nov 30, 2026 Lapses if unpaid Jun 1, 2027 · High confidence | Semes Co., Ltd. | In force | Nov 30, 2026 | Jun 1, 2027 | High confidence | |
| US 10,319,566 | Apparatus for Supplying Power and Apparatus for Treating Substrate Including the Same In force Fee due Dec 11, 2026 Lapses if unpaid Jun 11, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 11, 2026 | Jun 11, 2027 | High confidence | |
| US 11,673,075 | Degassing Apparatus and Substrate Treating Apparatus In force Fee due Dec 13, 2026 Lapses if unpaid Jun 14, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 13, 2026 | Jun 14, 2027 | High confidence | |
| US 11,676,804 | Apparatus and Method for Treating Substrate In force Fee due Dec 13, 2026 Lapses if unpaid Jun 14, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 13, 2026 | Jun 14, 2027 | High confidence | |
| US 11,679,447 | Apparatus and Method for Treating Substrate In force Fee due Dec 20, 2026 Lapses if unpaid Jun 21, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 20, 2026 | Jun 21, 2027 | High confidence | |
| US 11,682,577 | Spin Head, Apparatus and Method for Treating a Substrate Including the Spin Head In force Fee due Dec 20, 2026 Lapses if unpaid Jun 21, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 20, 2026 | Jun 21, 2027 | High confidence | |
| US 10,328,441 | Nozzle Unit and Coating Apparatus Including the Same In force Fee due Dec 25, 2026 Lapses if unpaid Jun 25, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 25, 2026 | Jun 25, 2027 | High confidence | |
| US 11,684,955 | Chemical Supply Unit, Substrate Processing Apparatus, and Substrate Processing Method In force Fee due Dec 27, 2026 Lapses if unpaid Jun 28, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 27, 2026 | Jun 28, 2027 | High confidence | |
| US 11,684,956 | Apparatus for Treating Substrate In force Fee due Dec 27, 2026 Lapses if unpaid Jun 28, 2027 · High confidence | Semes Co., Ltd. | In force | Dec 27, 2026 | Jun 28, 2027 | High confidence | |
| US 11,685,161 | Ink Tank for Liquid Chemical Discharging Apparatus and Liquid Chemical Discharging Apparatus Including the Same In force Fee due Dec 27, 2026 Lapses if unpaid Jun 28, 2027 · High confidence | Semes Co. Ltd. | In force | Dec 27, 2026 | Jun 28, 2027 | High confidence | |
| 139 more maintenance fees coming due in the 12 months from Nov 14, 2026 · Pro | |||||||
10 of 149 patents shown. Soonest fee due date first, then patent number.
Pro members see every patent with a maintenance fee coming due: number, title, status, the due date, and the date it lapses if the fee goes unpaid through the grace period.
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.