Semiconductor Systems, Inc.
Records under this name other than patents Semiconductor Systems, Inc. holds now: patents now held by others, patents whose terms have ended, and its applications, pending or abandoned.
Back to Semiconductor Systems, Inc.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 6,420,678 | Method for separating non-metallic substrates Formerly held Lapsed on the fee record Ended Jul 16, 2006 · From the USPTO record | Lapsed on the fee record | Ended Jul 16, 2006 | From the USPTO record |
| US 5,289,222 | Drain arrangement for photoresist coating apparatus Term ended Term ended no later than Feb 22, 2014 · Low confidence | Term ended | Term ended no later than Feb 22, 2014 | Low confidence |
| US 5,392,989 | Nozzle assembly for dispensing liquid Term ended Term ended no later than Feb 28, 2015 · Low confidence | Term ended | Term ended no later than Feb 28, 2015 | Low confidence |
| US 5,427,820 | Thermal control line for delivering liquid to a point of use in a photolithography system Term ended Term ended no later than Jun 27, 2015 · Low confidence | Term ended | Term ended no later than Jun 27, 2015 | Low confidence |
| US 5,443,348 | Cassette input/output unit for semiconductor processing system Term ended Term ended no later than Aug 22, 2015 · Low confidence | Term ended | Term ended no later than Aug 22, 2015 | Low confidence |
| US 5,472,502 | Apparatus and method for spin coating wafers and the like Term ended Term ended no later than Dec 5, 2015 · Low confidence | Term ended | Term ended no later than Dec 5, 2015 | Low confidence |
| US 5,553,994 | Thermal process module for substrate coat/develop system Term ended Term ended no later than Sep 10, 2016 · Low confidence | Term ended | Term ended no later than Sep 10, 2016 | Low confidence |
| US 5,651,823 | Clustered photolithography system Term ended Term ended no later than Jul 29, 2017 · Low confidence | Term ended | Term ended no later than Jul 29, 2017 | Low confidence |
| US 5,766,824 | Method and apparatus for curing photoresist Term ended Term ended no later than Jun 16, 2018 · Low confidence | Term ended | Term ended no later than Jun 16, 2018 | Low confidence |
| US 5,798,140 | Oscillatory chuck method and apparatus for coating flat substrates Term ended Term ended no later than Aug 25, 2018 · Low confidence | Term ended | Term ended no later than Aug 25, 2018 | Low confidence |