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Semitool, Inc.

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Records under this name other than patents Semitool, Inc. holds now: patents now held by others, patents whose terms have ended, and its applications, pending or abandoned.

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PatentTitleStatus Expires Confidence
US 8,104,488Single side workpiece processing
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,520,286Apparatus and method for cleaning and drying a container for semiconductor workpieces
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,531,060Integrated tool assemblies with intermediate processing modules for processing of microfeature workpieces
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 9,359,683Method of forming metal and metal alloy features
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,935,230Electro-chemical processor
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,842,173Apparatus and methods for electrochemical processing of microfeature wafers
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,849,865System for processing a workpiece
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,931,786Apparatus and method for agitating liquids in wet chemical processing of microfeature workpieces
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 7,927,469Electro-chemical processor
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
US 8,118,044Single workpiece processing chamber with tilting load/unload upper rim
Formerly held
In force
 · From the USPTO record
In forceFrom the USPTO record
10 of 406 patents shown.
Pro members see all 406.
Pro members: see all 406 patents
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