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Steag Microtech GmbH

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Records under this name other than patents Steag Microtech GmbH holds now: patents now held by others, patents whose terms have ended, and its applications, pending or abandoned.

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PatentTitleStatus Expires Confidence
US 6,799,588Apparatus for Treating Substrates
Formerly held
Term ended
Term ended Mar 10, 2021 · High confidence
Term endedTerm ended Mar 10, 2021High confidence
US 6,108,932Method and apparatus for thermocapillary drying
Formerly held
Term ended
Term ended Apr 27, 2019 · From the USPTO record
Term endedTerm ended Apr 27, 2019From the USPTO record
US 6,128,829Method for drying substrates
Formerly held
Term ended
Term ended Mar 10, 2019 · From the USPTO record
Term endedTerm ended Mar 10, 2019From the USPTO record
US 6,805,754Device and Method for Processing Substrates
Formerly held
Lapsed on the fee record
Ended Oct 19, 2016 · High confidence
Lapsed on the fee recordEnded Oct 19, 2016High confidence
US 6,607,604Method and apparatus for treating substrates
Formerly held
Lapsed on the fee record
Ended Aug 19, 2015 · From the USPTO record
Lapsed on the fee recordEnded Aug 19, 2015From the USPTO record
US 6,539,956Method and device for drying substrates
Formerly held
Lapsed on the fee record
Ended Apr 1, 2015 · From the USPTO record
Lapsed on the fee recordEnded Apr 1, 2015From the USPTO record
US 6,647,641Device and method for the treatment of substrates in a fluid container
Lapsed on the fee record
Ended Nov 18, 2011 · From the USPTO record
Lapsed on the fee recordEnded Nov 18, 2011From the USPTO record
US 6,523,552Facility for treating objects in a process tank
Formerly held
Lapsed on the fee record
Ended Feb 25, 2011 · From the USPTO record
Lapsed on the fee recordEnded Feb 25, 2011From the USPTO record
US 6,269,822Installation for wet-treating substrates
Formerly held
Lapsed on the fee record
Ended Aug 7, 2009 · From the USPTO record
Lapsed on the fee recordEnded Aug 7, 2009From the USPTO record
US 6,240,938Device for treating substrates in a fluid container
Formerly held
Lapsed on the fee record
Ended Jun 5, 2009 · From the USPTO record
Lapsed on the fee recordEnded Jun 5, 2009From the USPTO record
10 of 34 patents shown.
Pro members see all 34.
Pro members: see all 34 patents
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