Method for Reducing Metal Contamination and Film Deposition Apparatus

Tokyo Electron Limited

A patent family: one line of work, grouped by real continuity rather than by a technology label inferred from titles. In-force patents first, soonest term end first, then patent number. Expired patents follow, in the same order.

Patent	Title	Holder	Status	Expires	Time remaining	Confidence
US 11,214,864	Method for Reducing Metal Contamination and Film Deposition Apparatus Tokyo Electron Limited In force Term ends Sep 25, 2035 · High confidence	Tokyo Electron Limited	In force	Term ends Sep 25, 2035	Term ends Sep 25, 2035	High confidence
US 10,424,491	Etching Method Tokyo Electron Limited In force Term ends Nov 15, 2036 · High confidence	Tokyo Electron Limited	In force	Term ends Nov 15, 2036	Term ends Nov 15, 2036	High confidence
US 10,607,835	Etching Method Tokyo Electron Limited In force Term ends Nov 26, 2036 · High confidence	Tokyo Electron Limited	In force	Term ends Nov 26, 2036	Term ends Nov 26, 2036	High confidence
US 10,748,758	Method for Depositing a Silicon Nitride Film and Film Deposition Apparatus Tokyo Electron Limited In force Term ends May 27, 2037 · High confidence	Tokyo Electron Limited	In force	Term ends May 27, 2037	Term ends May 27, 2037	High confidence
US 10,553,409	Method of Cleaning Plasma Processing Apparatus Tokyo Electron Limited In force Term ends May 10, 2038 · High confidence	Tokyo Electron Limited	In force	Term ends May 10, 2038	Term ends May 10, 2038	High confidence
US 10,593,541	Film Deposition Method Tokyo Electron Limited In force Term ends May 10, 2038 · High confidence	Tokyo Electron Limited	In force	Term ends May 10, 2038	Term ends May 10, 2038	High confidence
US 10,366,888	Pattern Forming Method Tokyo Electron Limited and Tokyo Ohka Kogyo Co., Ltd. In force Term ends Jun 14, 2038 · High confidence	Tokyo Electron Limited and Tokyo Ohka Kogyo Co., Ltd.	In force	Term ends Jun 14, 2038	Term ends Jun 14, 2038	High confidence
US 10,651,077	Etching Method Tokyo Electron Limited In force Term ends Jun 18, 2038 · High confidence	Tokyo Electron Limited	In force	Term ends Jun 18, 2038	Term ends Jun 18, 2038	High confidence
US 10,665,416	Substrate Processing Apparatus Tokyo Electron Limited In force Term ends Jul 19, 2038 · High confidence	Tokyo Electron Limited	In force	Term ends Jul 19, 2038	Term ends Jul 19, 2038	High confidence
US 11,462,444	Substrate Container, Controller, and Abnormality Detection Method Tokyo Electron Limited In force Term ends Aug 2, 2038 · High confidence	Tokyo Electron Limited	In force	Term ends Aug 2, 2038	Term ends Aug 2, 2038	High confidence
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40 of these are in force and held by Tokyo Electron Limited.

Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know

Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.