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Maintenance fees coming due

Ulvac, Inc.

46 maintenance fees come due in the 12 months from Nov 14, 2026, the next on Dec 13, 2026. Unpaid by Jun 14, 2027, that one lapses early.
A maintenance fee does not end a patent on its due date. It falls due at 3.5, 7.5 and 11.5 years from grant, and the patent lapses only if the fee is still unpaid at the end of the six month grace period that follows.
PatentTitleHolderStatusFee dueLapses if unpaidExpiresConfidence
US 11,674,217Method of Manufacturing Substrate with a Transparent Conductive Film, Manufacturing Apparatus of Substrate with Transparent Conductive Film, Substrate with Transparent Conductive Film, and Solar Cell
In force
Fee due Dec 13, 2026
Lapses if unpaid Jun 14, 2027
 · High confidence
Ulvac, Inc.In forceDec 13, 2026Jun 14, 2027High confidence
US 9,059,105Ashing Apparatus
In force
Fee due Dec 16, 2026
Lapses if unpaid Jun 16, 2027
 · High confidence
Ulvac, Inc.In forceDec 16, 2026Jun 16, 2027High confidence
US 9,068,259Ac Power Supply for Sputtering Apparatus
In force
Fee due Dec 30, 2026
Lapses if unpaid Jun 30, 2027
 · High confidence
Ulvac, Inc.In forceDec 30, 2026Jun 30, 2027High confidence
US 9,080,947X-Ray Irradiation Device and Analysis Device
In force
Fee due Jan 14, 2027
Lapses if unpaid Jul 14, 2027
 · High confidence
National Institute for Materials Science and Ulvac-Phi, Inc.In forceJan 14, 2027Jul 14, 2027High confidence
US 9,093,485Transport Method
In force
Fee due Jan 28, 2027
Lapses if unpaid Jul 28, 2027
 · High confidence
Ulvac, Inc.In forceJan 28, 2027Jul 28, 2027High confidence
US 10,370,757Thin Substrate Processing Device
In force
Fee due Feb 6, 2027
Lapses if unpaid Aug 6, 2027
 · High confidence
Ulvac, Inc.In forceFeb 6, 2027Aug 6, 2027High confidence
US 10,378,102Rotary Cathode Unit for Magnetron Sputtering Apparatus
In force
Fee due Feb 13, 2027
Lapses if unpaid Aug 13, 2027
 · High confidence
Ulvac, Inc.In forceFeb 13, 2027Aug 13, 2027High confidence
US 9,109,284Vacuum Processing Apparatus
In force
Fee due Feb 18, 2027
Lapses if unpaid Aug 18, 2027
 · High confidence
Ulvac, Inc.In forceFeb 18, 2027Aug 18, 2027High confidence
US 11,732,965Freeze-Drying Device and Freeze-Drying Method
In force
Fee due Feb 22, 2027
Lapses if unpaid Aug 23, 2027
 · Medium confidence
Ulvac, Inc.In forceFeb 22, 2027Aug 23, 2027Medium confidence
US 9,139,381Transport Apparatus and Vacuum System
In force
Fee due Mar 22, 2027
Lapses if unpaid Sep 22, 2027
 · High confidence
Ulvac, Inc.In forceMar 22, 2027Sep 22, 2027High confidence
36 more maintenance fees coming due in the 12 months from Nov 14, 2026 · Pro
10 of 46 patents shown. Soonest fee due date first, then patent number.
Pro members see every patent with a maintenance fee coming due: number, title, status, the due date, and the date it lapses if the fee goes unpaid through the grace period.
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Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
The Patent Finder CompaniesExpirationsCalculatorWatchlistPricing MethodologyCorrectionsLegalPrivacysupport@thepatentfinder.com Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) Part of 137 Finder · © 2026 137 Finder LLC · Sources cited