Maintenance fees coming due

Versum Materials US, LLC

65 maintenance fees come due in the 12 months from Nov 15, 2026, the next on Dec 6, 2026. Unpaid by Jun 7, 2027, that one lapses early.

A maintenance fee does not end a patent on its due date. It falls due at 3.5, 7.5 and 11.5 years from grant, and the patent lapses only if the fee is still unpaid at the end of the six month grace period that follows.

Patent	Title	Holder	Status	Fee due	Lapses if unpaid	Expires	Confidence
US 11,667,839	Low Oxide Trench Dishing Chemical Mechanical Polishing Versum Materials US, LLC In force Fee due Dec 6, 2026 Lapses if unpaid Jun 7, 2027 Term ends Jun 24, 2039 · Medium confidence	Versum Materials US, LLC	In force	Dec 6, 2026	Jun 7, 2027	Term ends Jun 24, 2039	Medium confidence
US 11,670,512	Selective Deposition on Silicon Containing Surfaces Versum Materials US, LLC In force Fee due Dec 6, 2026 Lapses if unpaid Jun 7, 2027 Term ends Feb 10, 2040 · High confidence	Versum Materials US, LLC	In force	Dec 6, 2026	Jun 7, 2027	Term ends Feb 10, 2040	High confidence
US 10,317,136	Onsite Ultra High Purity Chemicals or Gas Purification Versum Materials US, LLC In force Fee due Dec 11, 2026 Lapses if unpaid Jun 11, 2027 Term ends Mar 11, 2035 · High confidence	Versum Materials US, LLC	In force	Dec 11, 2026	Jun 11, 2027	Term ends Mar 11, 2035	High confidence
US 10,319,584	Compositions and Processes for Depositing Carbon-Doped Silicon-Containing Films Versum Materials US, LLC In force Fee due Dec 11, 2026 Lapses if unpaid Jun 11, 2027 Term ends Jun 1, 2032 · High confidence	Versum Materials US, LLC	In force	Dec 11, 2026	Jun 11, 2027	Term ends Jun 1, 2032	High confidence
US 10,319,862	Barrier Materials for Display Devices Versum Materials US, LLC In force Fee due Dec 11, 2026 Lapses if unpaid Jun 11, 2027 Term ends Jul 5, 2033 · High confidence	Versum Materials US, LLC	In force	Dec 11, 2026	Jun 11, 2027	Term ends Jul 5, 2033	High confidence
US 9,062,230	Chemical Mechanical Polishing (CMP) Composition for Shallow Trench Isolation (STI) Applications and Methods of Making Thereof Versum Materials US, LLC In force Fee due Dec 23, 2026 Lapses if unpaid Jun 23, 2027 Term ends Sep 18, 2033 · High confidence	Versum Materials US, LLC	In force	Dec 23, 2026	Jun 23, 2027	Term ends Sep 18, 2033	High confidence
US 10,332,784	Selectively Removing Titanium Nitride Hard Mask and Etch Residue Removal Versum Materials US, LLC In force Fee due Dec 25, 2026 Lapses if unpaid Jun 25, 2027 Term ends Apr 28, 2036 · High confidence	Versum Materials US, LLC	In force	Dec 25, 2026	Jun 25, 2027	Term ends Apr 28, 2036	High confidence
US 11,692,110	Low Oxide Trench Dishing Chemical Mechanical Polishing Versum Materials US, LLC In force Fee due Jan 4, 2027 Lapses if unpaid Jul 6, 2027 Term ends Jun 24, 2039 · High confidence	Versum Materials US, LLC	In force	Jan 4, 2027	Jul 6, 2027	Term ends Jun 24, 2039	High confidence
US 10,354,860	Method and Precursors for Manufacturing 3D Devices Versum Materials US, LLC In force Fee due Jan 16, 2027 Lapses if unpaid Jul 16, 2027 Term ends Sep 30, 2035 · High confidence	Versum Materials US, LLC	In force	Jan 16, 2027	Jul 16, 2027	Term ends Sep 30, 2035	High confidence
US 11,702,743	Trisilylamine Derivatives as Precursors for High Growth Rate Silicon-Containing Films Versum Materials US, LLC In force Fee due Jan 18, 2027 Lapses if unpaid Jul 19, 2027 Term ends Sep 18, 2038 · High confidence	Versum Materials US, LLC	In force	Jan 18, 2027	Jul 19, 2027	Term ends Sep 18, 2038	High confidence
55 more maintenance fees coming due in the 12 months from Nov 15, 2026 · Pro

10 of 65 patents shown. Soonest fee due date first, then patent number.

Pro members see every patent with a maintenance fee coming due: number, title, status, the due date, and the date it lapses if the fee goes unpaid through the grace period.

Upgrade to Pro

Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.