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US

Variable Mode Plasma Chamber Utilizing Tunable Plasma Potential

US 12,002,652 In force
OverviewFamilyAssignmentsSources & methods

Term ends Oct 27, 2039 · High confidence

Filed Nov 29, 2021 as application 17/536,733 · Granted Jun 4, 2024
Base term plus 102 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2019 2039
Clock starts
Jul 17, 2019
Term ends
Oct 27, 2039
Granted
Jun 4, 2024
base term patent term adjustment Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
102
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
No effect
Terminal disclaimer
Resolved from the filed document, referencing US 11,189,464, to Oct 27, 2039. The term already ends on or before that date, so the cap shortened nothing.
0 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
5
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 102 days past its 20-year base term on prosecution delay. A terminal disclaimer is resolved from the filed document, and it ends no earlier than this term, so it shortens nothing. 0 of 3 maintenance fees are paid so far. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Jul 17, 2019, when application 16/514,237, the earliest non-provisional in its chain, was filed (this one was filed Nov 29, 2021)Jul 17, 2039High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+102 days, USPTO patent term adjustment recordOct 27, 2039High confidence
Terminal disclaimer capDisclaimer resolved from the filed document (refs US 11,189,464)resolves to Oct 27, 2039, no earlier than this term, so no changeHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events0 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderOct 27, 2039High confidence

This family

US 11,189,464In force
Jan 2040
Jan 2040
US 11,049,692In force
Jul 2039
Jul 2039
Application PCT/US2020/042329PCT application
no patent term
no patent term
US 12,002,652this patent
Oct 2039
Oct 2039
US 12,562,342In force
Aug 2039
Aug 2039
The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Apr 19, 2022
Reel 59638, frame 656
Savas, Stephen E.; Ma, ShawmingMattson Technology, Inc.Assignment of Assignor's Interest
Apr 19, 2022
Reel 59638, frame 670
Mattson Technology, Inc.Beijing e-Town Semiconductor Technology Co., Ltd.; Mattson Technology, Inc.Assignment of Assignor's Interest
Apr 19, 2022
reel/frame not recorded
Mattson Technology, Inc.Beijing e-Town Semiconductor Technology Co., Ltd.Assignment of Assignor's Interest
Apr 19, 2022
reel/frame not recorded
Mattson Technology, Inc.Mattson Technology, Inc.Assignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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