Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holes

US 6,955,991 Lapsed on the fee record

Overview Sources & methods

Lapsed Oct 18, 2009 on the fee record · From the USPTO record

Computed 20-year base term

First maintenance fee unpaid; grace period ended.

Named at grant Jetek, Inc. · find this owner

Filed Feb 6, 2003 as application 10/359,326 · Granted Oct 18, 2005

Base term, 20 years from filing

Today

Lapsed Oct 18, 2009

2000 2026

Clock starts
Sep 28, 2000

No longer in force
Oct 18, 2009

Granted
Oct 18, 2005

Term would have run to
Sep 28, 2020

base term after the term ends Updated Nov 15, 2026 · includes USPTO assignment & status data published Nov 15, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know

None

Term adjustment

No prosecution delay on this record.

Unresolved

Terminal disclaimer

On file, reference document not resolved, so the date above is an upper bound. We do not guess the cap.

0 of 3

Maintenance fees paid

Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.

Step	Input	Date after this step	Confidence
Base term, 20 years from filing	Clock starts Sep 28, 2000, when the earliest non-provisional application in its chain was filed (this one was filed Feb 6, 2003); a parent in its chain could not be resolved (the next row)	Sep 28, 2020	High confidence
Continuity chain	A parent in the chain could not be resolved	dated from this application's own claim	Medium confidence
Patent term adjustment	None on file	no change	High confidence
Terminal disclaimer cap	Disclaimer on file (approved), reference document not resolved	no cap applied, and none guessed	Medium confidence
Patent term extension	None on file	no change	High confidence
Fee events	0 of 3 maintenance fees paid	lapsed Oct 18, 2009	High confidence
Computed term end	The steps above, in order	Oct 18, 2009	From the USPTO record

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

Not on this page: the patent's family, its recorded assignments and its citation count. USPTO's assignment records, linked above, list every recorded assignment.

Every date shows its work: the base term, any term adjustment or extension, any disclaimer cap, and the maintenance fee record, each with a confidence tier. How this record was built

Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.

Atmospheric process and system for controlled and rapid removal of polymers from high depth to width aspect ratio holes

Lapsed Oct 18, 2009 on the fee record · From the USPTO record

20-year base term ended Sep 28, 2020

How we calculated this date

Sources