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Controlling Critical Dimensions of Structures Formed on a Wafer in Semiconductor Processing

US 7,566,181 Term ended
OverviewFamilyAssignmentsSources & methods

Term ended Nov 12, 2026 · High confidence

Filed Sep 1, 2004 as application 10/933,028 · Granted Jul 28, 2009
Base term plus 802 days of patent term adjustment (USPTO delay)
Today
20 years from filing
Term ended Nov 12, 2026
2004 2026
Clock starts
Sep 1, 2004
Term ended
Nov 12, 2026
Granted
Jul 28, 2009
base term patent term adjustment after the term ends fee events Updated Nov 15, 2026 · includes USPTO assignment & status data published Nov 15, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
802
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
None
Terminal disclaimer
No disclaimer on this record.
3 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
2
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 802 days past its 20-year base term on prosecution delay. All three maintenance fees were paid, so no fee lapse ended it. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Sep 1, 2004, when this application, 10/933,028, was filedSep 1, 2024High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+802 days, USPTO patent term adjustment recordNov 12, 2026High confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events3 of 3 maintenance fees paidterm endedHigh confidence
Computed term endThe steps above, in orderNov 12, 2026High confidence

This family

US 7,566,181this patent
Nov 2026
Nov 2026
Application PCT/US2005/031254PCT application
no patent term
no patent term
The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Sep 2, 2004
Reel 15764, frame 484
Yang, Wenge; Nolet, AlanTimbre Technologies Inc.Assignment of Assignor's Interest
Mar 12, 2009
Reel 22388, frame 109
Timbre Technologies, Inc.Tokyo Electron LimitedAssignment of Assignor's Interest
Jun 24, 2009
Reel 22871, frame 409
Timbre Technologies, Inc.Tokyo Electron LimitedAssignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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