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Method and System for Reducing the Impact of Across-Wafer Variations on Critical Dimension Measurements

US 7,588,868 In force
OverviewFamilyAssignmentsSources & methods

Also listed on Invarium, Inc., an earlier holder on the record. The recorded assignments below show how it moved.

Term ends Aug 12, 2027 · High confidence

Filed Oct 22, 2004 as application 10/971,350 · Granted Sep 15, 2009
Base term plus 1040 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2004 2027
Clock starts
Oct 6, 2004
Term ends
Aug 12, 2027
Granted
Sep 15, 2009
base term patent term adjustment fee events Updated Nov 15, 2026 · includes USPTO assignment & status data published Nov 15, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
1,040
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
None
Terminal disclaimer
No disclaimer on this record.
3 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
11
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 1040 days past its 20-year base term on prosecution delay. All three maintenance fees are recorded paid; no more fees are due. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Oct 6, 2004, when application 10/960,357, the earliest non-provisional in its chain, was filed (this one was filed Oct 22, 2004)Oct 6, 2024High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+1040 days, USPTO patent term adjustment recordAug 12, 2027High confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events3 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderAug 12, 2027High confidence

This family

US 7,275,225Term ended
Apr 2025
Apr 2025
US 7,277,165Term ended
May 2025
May 2025
US 7,266,800Term ended
Apr 2025
Apr 2025
US 7,246,343Term ended
Apr 2025
Apr 2025
US 7,189,481Lapsed on the fee record
Mar 2019
Mar 2019
US 7,337,421Term ended
Aug 2025
Aug 2025
Application 10/960,357Abandoned
not computed
not computed
US 7,588,868this patent
Aug 2027
Aug 2027
8 of 11 applications in this family shown, earliest filings first. The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Mar 8, 2005
Reel 15858, frame 885
Zach, Franz X.; Sezginer, Abdurrahman; Percin, GokhanInvarium, Inc.Assignment of Assignor's Interest
Jun 19, 2008
Reel 21121, frame 930
Invarium, Inc.Cadence Design Systems, Inc.Assignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

The Patent Finder CompaniesExpirationsCalculatorWatchlistPricing MethodologyCorrectionsLegalPrivacysupport@thepatentfinder.com Updated Nov 15, 2026 · includes USPTO assignment & status data published Nov 15, 2026 and grant & fee data published Nov 10, 2026 (weekly) Part of 137 Finder · © 2026 137 Finder LLC · Sources cited