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Angled-Wedge Chrome-Face Wall for Intensity Balance of Alternating Phase Shift Mask

US 7,674,562 Lapsed on the fee record
OverviewFamilyAssignmentsSources & methods

Lapsed Mar 9, 2022 on the fee record · High confidence

Third maintenance fee unpaid; grace period ended.

Filed Dec 7, 2005 as application 11/297,532 · Granted Mar 9, 2010
Base term, 20 years from filing, plus 1065 days of patent term adjustment (USPTO delay) · capped by a resolved terminal disclaimer
Today
Lapsed Mar 9, 2022
2005 2026
Clock starts
Dec 7, 2005
No longer in force
Mar 9, 2022
Granted
Mar 9, 2010
Term would have run to
Sep 1, 2026
base term patent term adjustment after the term ends fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
1,065
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
Capped
Terminal disclaimer
Resolved from the filed document, referencing US 7,384,714.
2 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
13
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

Its term would have run to Sep 1, 2026: its 20-year base term plus 1065 days of term adjustment for prosecution delay. A terminal disclaimer resolved from the filed document caps it earlier. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Dec 7, 2005, when this application, 11/297,532, was filedDec 7, 2025High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+1065 days, USPTO patent term adjustment recordNov 6, 2028High confidence
Terminal disclaimer capDisclaimer resolved from the filed document (refs US 7,384,714)capped to Sep 1, 2026High confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events2 of 3 maintenance fees paidlapsed Mar 9, 2022High confidence
Computed term endThe steps above, in orderMar 9, 2022High confidence

This family

US 7,674,562this patent
Mar 2022
Mar 2022
US 7,678,586Lapsed on the fee record
Mar 2022
Mar 2022
US 7,888,214Lapsed on the fee record
Feb 2019
Feb 2019
Application 11/304,412Abandoned
not computed
not computed
US 7,524,755Lapsed on the fee record
Apr 2021
Apr 2021
US 7,376,920Lapsed on the fee record
May 2020
May 2020
US 7,585,746In force
May 2027
May 2027
US 7,727,856Lapsed on the fee record
Jun 2022
Jun 2022
8 of 13 applications in this family shown, earliest filings first. The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Dec 7, 2005
Reel 17348, frame 31
Chua, Gek Soon; Tan, Sia Kim; Lin, Qunying; Tay, Cho Jui; Quan, ChenggenChartered Semiconductor Manufacturing Ltd.Assignment of Assignor's Interest
Jul 21, 2006
Reel 17971, frame 469
Pent Technologies, Inc.; Dekko Technologies, LLCDymas Funding Company, LLC, as AgentSecurity Agreement
Jan 9, 2008
Reel 20325, frame 952
Dekko Technologies, LLCPent Technologies, Inc.Assignment of Assignor's Interest
Jul 28, 2010
Reel 24741, frame 706
Chartered Semiconductor Manufacturing Ltd.Chartered Semiconductor Manufacturing Pte. Ltd.Change of Name
Jul 28, 2010
Reel 24741, frame 712
Chartered Semiconductor Manufacturing Pte. Ltd.GlobalFoundries Singapore Pte. Ltd.Change of Name
Oct 17, 2011
Reel 27074, frame 720
Dymas Funding Company LLCPent Technologies, Inc.; Dekko Technologies, LLCCorrective Release to Void in Part the Patent Security Agreement Recorded at Reel 17971 Frame 469
Oct 17, 2011
reel/frame not recorded
Dymas Funding Company LLCPent Technologies, Inc.Corrective Release to Void in Part the Patent Security Agreement Recorded at Reel 17971 Frame 469
Oct 17, 2011
reel/frame not recorded
Dymas Funding Company LLCDekko Technologies, LLCCorrective Release to Void in Part the Patent Security Agreement Recorded at Reel 17971 Frame 469
Nov 17, 2020
Reel 54452, frame 316
GlobalFoundries Singapore Pte. Ltd.Taiwan Semiconductor Manufacturing Co., Ltd.Assignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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