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Methods and Systems for Controlling Temperature During Microfeature Workpiece Processing, E.G. CVD Deposition

US 7,771,537 In force
OverviewFamilyAssignmentsSources & methods

Term ends Nov 16, 2026 · High confidence

No current holder resolved from the recorded chain.
Filed May 4, 2006 as application 11/418,337 · Granted Aug 10, 2010
Base term plus 1072 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2003 2026
Clock starts
Dec 10, 2003
Term ends
Nov 16, 2026
Granted
Aug 10, 2010
base term patent term adjustment fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
1,072
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
None
Terminal disclaimer
No disclaimer on this record.
3 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
3
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 1072 days past its 20-year base term on prosecution delay. All three maintenance fees are recorded paid; no more fees are due. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Dec 10, 2003, when application 10/733,523, the earliest non-provisional in its chain, was filed (this one was filed May 4, 2006)Dec 10, 2023High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+1072 days, USPTO patent term adjustment recordNov 16, 2026High confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events3 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderNov 16, 2026High confidence

This family

US 7,258,892Term ended
Oct 2024
Oct 2024
US 7,771,537this patent
Nov 2026
Nov 2026
US 8,518,184Term ended
Dec 2023
Dec 2023
The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
May 12, 2016
Reel 38669, frame 1
Micron Technology, Inc.U.S. Bank National Association, as Collateral AgentSecurity Interest
Jun 2, 2016
Reel 38954, frame 1
Micron Technology, Inc.Morgan Stanley Senior Funding, Inc., as Collateral AgentPatent Security Agreement
Jun 8, 2017
Reel 43079, frame 1
Micron Technology, Inc.U.S. Bank National Association, as Collateral AgentCorrective Assignment to Correct the Replace Erroneously Filed Patent #7358718 with the Correct Patent #7358178 Previously Recorded on Reel 038669 Frame 0001. Assignor(S) Hereby Confirms the Security Interest.
Jul 13, 2018
Reel 47540, frame 1
Micron Technology, Inc.; Micron Semiconductor Products, Inc.JPMorgan Chase Bank, N.A., as Collateral AgentSecurity Interest
Aug 23, 2018
Reel 47243, frame 1
U.S. Bank National Association, as Collateral AgentMicron Technology, Inc.Release of Security Interest
Oct 9, 2019
Reel 50937, frame 1
Morgan Stanley Senior Funding, Inc., as Collateral AgentMicron Technology, Inc.Release of Security Interest
Nov 12, 2019
Reel 51028, frame 1
JPMorgan Chase Bank, N.A., as Collateral AgentMicron Technology, Inc.; Micron Semiconductor Products, Inc.Release of Security Interest
Nov 12, 2019
reel/frame not recorded
JPMorgan Chase Bank, N.A., as Collateral AgentMicron Technology, Inc.Release of Security Interest
Nov 12, 2019
reel/frame not recorded
JPMorgan Chase Bank, N.A., as Collateral AgentMicron Semiconductor Products, Inc.Release of Security Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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