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US

Method of Depositing a Film

US 9,441,291 In force
OverviewFamilyAssignmentsSources & methods

Term ends Apr 30, 2035 · High confidence

Filed Apr 30, 2015 as application 14/700,593 · Granted Sep 13, 2016
Base term, 20 years from filing
Today
20 years from filing
2015 2035
Clock starts
Apr 30, 2015
Term ends
Apr 30, 2035
Granted
Sep 13, 2016
base term fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
None
Term adjustment
No prosecution delay on this record.
None
Terminal disclaimer
No disclaimer on this record.
2 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
47
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term is its 20-year base term, with no adjustment for prosecution delay. 2 of 3 maintenance fees are paid so far. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Apr 30, 2015, when this application, 14/700,593, was filedApr 30, 2035High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustmentNone on fileno changeHigh confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events2 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderApr 30, 2035High confidence

This family

Application 14/691,656Abandoned
not computed
not computed
US 9,441,291this patent
Apr 2035
Apr 2035
US 9,601,318In force
May 2035
May 2035
US 10,151,028In force
May 2036
May 2036
US 9,623,516In force
Jun 2035
Jun 2035
US 10,233,535In force
Apr 2037
Apr 2037
US 9,885,612Lapsed on the fee record
Feb 2026
Feb 2026
US 9,711,370In force
Aug 2035
Aug 2035
8 of 47 applications in this family shown, earliest filings first. The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Apr 30, 2015
Reel 35538, frame 428
Kumagai, Takeshi; Otani, MuneyukiTokyo Electron LimitedAssignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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