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Mirror for the Euv Wavelength Range, Substrate for Such a Mirror, Projection Objective for Microlithography Comprising Such a Mirror or Such a Substrate, and Projection Exposure Apparatus for Microlithography Comprising Such a Projection Objective

US 9,494,718 In force
OverviewFamilyAssignmentsSources & methods

Also listed on Hays AG, an earlier holder on the record. The recorded assignments below show how it moved.

Term ends Aug 24, 2033 · High confidence

Filed Jun 15, 2012 as application 13/525,233 · Granted Nov 15, 2016
Base term plus 1020 days of patent term adjustment (USPTO delay)
Today
20 years from filing
2010 2033
Clock starts
Nov 8, 2010
Term ends
Aug 24, 2033
Granted
Nov 15, 2016
base term patent term adjustment fee events Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
1,020
Days of term adjustment
Read from the USPTO patent term adjustment record, not recalculated here.
None
Terminal disclaimer
No disclaimer on this record.
2 of 3
Maintenance fees paid
Three maintenance fees fall due, at 3.5, 7.5 and 11.5 years from grant. This counts the ones the record shows paid.
2
Family applications on record here
Applications sharing this one's continuity chain whose file history this site holds. The family may have others.

This patent's term runs 1020 days past its 20-year base term on prosecution delay. 2 of 3 maintenance fees are paid so far. Confidence: High. from the record

How we calculated this date

One row per rule, each showing its own input and what it did to the date. A step we could not verify says so instead of resolving itself.
StepInputDate after this stepConfidence
Base term, 20 years from filingClock starts Nov 8, 2010, when application PCT/EP2010/067003, the earliest non-provisional in its chain, was filed (this one was filed Jun 15, 2012)Nov 8, 2030High confidence
Continuity chainEvery parent in the chain resolvedno changeHigh confidence
Patent term adjustment+1020 days, USPTO patent term adjustment recordAug 24, 2033High confidence
Terminal disclaimer capNone on recordno cap appliedHigh confidence
Patent term extensionNone on fileno changeHigh confidence
Fee events2 of 3 maintenance fees paidIn forceHigh confidence
Computed term endThe steps above, in orderAug 24, 2033High confidence

This family

US 9,494,718this patent
Aug 2033
Aug 2033
1 of 2 applications in this family shown, earliest filings first. The applications whose file history this site holds. The family may have others.

Assignments

Assignment documents as recorded at the USPTO, oldest first, with the reel and frame each was recorded at. A recorded assignment is a filed document, not a statement of current ownership, and the absence of a later one is not evidence that the last one still stands.
RecordedAssignorAssigneeConveyance
Aug 20, 2013
Reel 31045, frame 600
Braun, GerhardHays AGAssignment of Assignor's Interest
Aug 28, 2013
Reel 31097, frame 619
Hays AGCarl Zeiss SMT GmbHAssignment of Assignor's Interest
Mar 24, 2014
Reel 32506, frame 52
Weber, Joern; Dodoc, Aurelian; Migura, Sascha; Zaczek, Christoph; Paul, Hans-jochen; Clauss, Wilfried; Muellender, Stephan; Loercher, Roland; Blanckenhagen, GiselaCarl Zeiss SMT GmbHAssignment of Assignor's Interest

Sources

Google Patents · The patent document at USPTO · Assignment records at USPTO

USPTO account required: This application in Patent Center · USPTO's maintenance fee lookup

Maintenance fee events come from USPTO's own fee records. Its fee lookup asks for the patent number and the application number.

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