Maintenance fees coming due

Cymer, LLC

28 maintenance fees come due in the 12 months from Nov 14, 2026, the next on Nov 14, 2026. Unpaid by May 14, 2027, that one lapses early.

A maintenance fee does not end a patent on its due date. It falls due at 3.5, 7.5 and 11.5 years from grant, and the patent lapses only if the fee is still unpaid at the end of the six month grace period that follows.

Patent	Title	Holder	Status	Fee due	Lapses if unpaid	Expires	Confidence
US 10,288,483	Recovering Spectral Shape from Spatial Output Cymer, LLC In force Fee due Nov 14, 2026 Lapses if unpaid May 14, 2027 Term ends Jul 25, 2037 · High confidence	Cymer, LLC	In force	Nov 14, 2026	May 14, 2027	Term ends Jul 25, 2037	High confidence
US 10,288,484	Homogenization of Light Beam for Spectral Feature Metrology Cymer, LLC In force Fee due Nov 14, 2026 Lapses if unpaid May 14, 2027 Term ends Nov 29, 2036 · High confidence	Cymer, LLC	In force	Nov 14, 2026	May 14, 2027	Term ends Nov 29, 2036	High confidence
US 9,065,248	Systems and Methods to More Accurately Estimate a Fluorine Concentration in a Source Laser Cymer, LLC In force Fee due Dec 23, 2026 Lapses if unpaid Jun 23, 2027 Term ends Feb 14, 2034 · High confidence	Cymer, LLC	In force	Dec 23, 2026	Jun 23, 2027	Term ends Feb 14, 2034	High confidence
US 11,686,951	Reducing Speckle in an Excimer Light Source ASML Netherlands B.V. In force Fee due Dec 27, 2026 Lapses if unpaid Jun 28, 2027 Term ends Sep 15, 2037 · High confidence	ASML Netherlands B.V.	In force	Dec 27, 2026	Jun 28, 2027	Term ends Sep 15, 2037	High confidence
US 10,345,714	Lithography Optics Adjustment and Monitoring Cymer, LLC In force Fee due Jan 9, 2027 Lapses if unpaid Jul 9, 2027 Term ends Jul 12, 2036 · Medium confidence	Cymer, LLC	In force	Jan 9, 2027	Jul 9, 2027	Term ends Jul 12, 2036	Medium confidence
US 11,747,739	Method and Apparatus for Imaging Using Narrowed Bandwidth Cymer, LLC In force Fee due Mar 5, 2027 Lapses if unpaid Sep 7, 2027 Term ends Feb 10, 2040 · High confidence	Cymer, LLC	In force	Mar 5, 2027	Sep 7, 2027	Term ends Feb 10, 2040	High confidence
US 11,749,520	Electrode for a Discharge Chamber Cymer, LLC In force Fee due Mar 5, 2027 Lapses if unpaid Sep 7, 2027 Term ends Dec 14, 2038 · High confidence	Cymer, LLC	In force	Mar 5, 2027	Sep 7, 2027	Term ends Dec 14, 2038	High confidence
US 9,130,337	System and Method for Automatic Gas Optimization in a Two-Chamber Gas Discharge Laser System Cymer, LLC In force Fee due Mar 8, 2027 Lapses if unpaid Sep 8, 2027 Term ends Sep 10, 2034 · High confidence	Cymer, LLC	In force	Mar 8, 2027	Sep 8, 2027	Term ends Sep 10, 2034	High confidence
US 11,754,541	Fluorine Detection in a Gas Discharge Light Source Cymer, LLC In force Fee due Mar 12, 2027 Lapses if unpaid Sep 13, 2027 Term ends Aug 22, 2040 · High confidence	Cymer, LLC	In force	Mar 12, 2027	Sep 13, 2027	Term ends Aug 22, 2040	High confidence
US 10,416,471	Spectral Feature Control Apparatus Cymer, LLC In force Fee due Mar 17, 2027 Lapses if unpaid Sep 17, 2027 Term ends Oct 17, 2036 · High confidence	Cymer, LLC	In force	Mar 17, 2027	Sep 17, 2027	Term ends Oct 17, 2036	High confidence
18 more maintenance fees coming due in the 12 months from Nov 14, 2026 · Pro

10 of 28 patents shown. Soonest fee due date first, then patent number.

Pro members see every patent with a maintenance fee coming due: number, title, status, the due date, and the date it lapses if the fee goes unpaid through the grace period.

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Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.