The Patent Finder
CY

Cymer, LLC

Filings on record here from 2001, where this site's data begins
OverviewNotableFeesChangesFamiliesPatent listSources & methods

152 patents currently held

64 more in force are now held by other companies
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.

The next term ends in Nov 2026. from the record

Of the 64 now held by other companies, 62 name ASML Netherlands B.V. as their current owner, and 2 more name another party. Each row says which.

Free plan: 3 watched companies. Pro: unlimited.
Alerts on its grants, lapses and transfers.
33
Ending by 2030
Nov 2026
Next term end
116
Patent families

When these terms end

Held patents by the year their term ends
notable patents fee due within 90 days all others Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
Notable: the highest-ranked patents in this portfolio by citations and family size. Fee due within 90 days: a maintenance fee is due within 90 days of when this page was computed and not yet paid.

Notable patents

Ranked by citations and family size, against patents of the same kind granted the same year. How we rank
Notable
Laser System US 7,885,309
Cited by 50 later US patents, top 25% of utility patents granted in 2011 in our data, and renewed at 3 of 3 maintenance windows. Protection runs to 2029.
Ends Apr 2029 · Medium confidence Also notable
Wafer-Based Light Source Parameter Control US 9,715,180
Cited by 29 later US patents, top 25% of utility patents granted in 2017 in our data, and renewed at every maintenance window due so far. Protection runs to 2034.
Ends Jul 2034 · High confidence Also notable
Wafer-Based Light Source Parameter Control US 9,989,866
Cited by 14 later US patents, top 25% of utility patents granted in 2018 in our data, and renewed at every maintenance window due so far. Protection runs to 2036.
Ends Oct 2036 · High confidence

Formerly held, still cited

Notable
LPP Euv Light Source Drive Laser System US 7,439,530
The most cited patent in this portfolio, cited by 103 later US patents, top 10% of utility patents granted in 2008 in our data. Protection runs to 2027.
now held by ASML Netherlands B.V.
Ends Jan 2027 · High confidence
Also notable
Laser Produced Plasma Euv Light Source Having a Droplet Stream Produced Using a Modulated Disturbance Wave US 7,897,947
Cited by 46 later US patents, top 25% of utility patents granted in 2011 in our data, and renewed at 3 of 3 maintenance windows. Protection runs to 2028.
now held by ASML Netherlands B.V.
Ends Dec 2028 · High confidence

Fee deadlines

Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
  • 2 fees due Nov 14, 2026
  • 2 fees due Dec 23 to 27, 2026 · next Dec 23
  • 1 fee due Jan 9, 2027
    The maintenance fee for Lithography Optics Adjustment and Monitoring (US 10,345,714) comes due Jan 9, 2027. Unpaid by Jul 9, 2027, it lapses early.
  • 8 fees due Mar 5 to 26, 2027 · next Mar 5
  • 5 fees due Apr 3 to 30, 2027 · next Apr 3
  • 1 fee due Jun 8, 2027
    The maintenance fee for Active Spectral Control During Spectrum Synthesis (US 9,207,119) comes due Jun 8, 2027. Unpaid by Dec 8, 2027, it lapses early.
  • 3 fees due Jul 2 to 26, 2027 · next Jul 2
  • 1 fee due Aug 16, 2027
    The maintenance fee for Compensation for a Disturbance in an Optical Source (US 9,261,794) comes due Aug 16, 2027. Unpaid by Feb 16, 2028, it lapses early.
  • 1 fee due Sep 10, 2027
    The maintenance fee for Reducing Optical Damage on an Optical Element (US 10,585,215) comes due Sep 10, 2027. Unpaid by Mar 10, 2028, it lapses early.
  • 4 fees due Oct 2 to 21, 2027 · next Oct 2

Which patents, and when each one lapses · Pro

Recent changes

  • Oct 28Assignment recorded on 1 record: Luo, Edward Siqi to Cymer, LLC Recorded Oct 28, 2026, executed May 8, 2024. Conveyance as recorded: Assignment of Assignor's Interest. A recorded assignment is a filed document, not a statement of current ownership. Reel 76546, frame 74.
  • 4 of the patents on this record were granted since Aug 16, 2026
  • 8 terms have ended since Aug 16, 2026

What they patent

The 5 largest of its 116 families, grouped by real patent family and labeled by the earliest filing in each. No technology classification is inferred from titles.
Laser System8 in forceto Apr 2029
Spectral Feature Control Apparatus4 in forceto Jun 2037
Reducing Speckle in an Excimer Light Source3 in forceto Sep 2037
Lithography Optics Adjustment and Monitoring3 in forceto Aug 2036
Gas Optimization in a Gas Discharge Light Source3 in forceto Feb 2036

Patents held now

Soonest term end first.
PatentTitleStatusExpiresConfidence
US 7,643,529Laser System
In force
 · Medium confidence
In forceMedium confidence
US 7,630,424Laser System
In force
 · Medium confidence
In forceMedium confidence
US 7,822,092Laser System
In force
 · Medium confidence
In forceMedium confidence
US 7,643,522Method and Apparatus for Gas Discharge Laser Bandwidth and Center Wavelength Control
In force
 · Medium confidence
In forceMedium confidence
US 7,778,302Laser System
In force
 · Medium confidence
In forceMedium confidence
US 7,852,889Active Spectral Control of Duv Light Source
In force
 · High confidence
In forceHigh confidence
US 7,835,414Laser Gas Injection System
In force
 · High confidence
In forceHigh confidence
US 7,822,084Method and Apparatus for Stabilizing and Tuning the Bandwidth of Laser Light
In force
 · High confidence
In forceHigh confidence
US 7,746,913Laser System
In force
 · Medium confidence
In forceMedium confidence
US 7,920,616Laser System
In force
 · Medium confidence
In forceMedium confidence
10 of 152 patents shown.
Pro members see all 152.
Pro members: see all 152 patents
Also on record, not counted in the 152: 64 patents in force now held by others · 199 patents ended · 69 applications pending · 10 applications abandoned. List them

Sources and methods

Compiled from USPTO application file histories, grants and recorded assignments, with the company's own names reviewed by hand. How this record was built
Portfolio grouped automatically from ownership conveyances to the names matched to this company, usually every name that begins with its own, so it counts patents an affiliate holds; each list row names the holder of record. Security interests are excluded and ambiguous records are not reviewed by hand.
Fee due within 90 days marks a patent with a maintenance fee due within 90 days of the date this page was computed and not yet recorded paid, so it can end earlier than the bar shows. A fee left unpaid ends the patent at the close of the six month grace period that follows its due date, not on the due date itself. It is not a prediction that the fee will be missed.
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.
Export every term end as CSV · Pro
The Patent Finder CompaniesExpirationsCalculatorWatchlistPricing MethodologyCorrectionsLegalPrivacysupport@thepatentfinder.com Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) Part of 137 Finder · © 2026 137 Finder LLC · Sources cited