619 patents currently held
7 more in force are now held by other companies
Held is read from USPTO's recorded assignments; a transfer never recorded there does not appear.
1 more record may belong here and awaits a decision; it is not counted.
The next term ends in Mar 2027. from the record
Free plan: 3 watched companies. Pro: unlimited.
Alerts on its grants, lapses and transfers.
73
Ending by 2030
Mar 2027
Next term end
585
Patent families
When these terms end
Held patents by the year their term ends
notable patents
fee due within 90 days
all others
Updated Nov 14, 2026 · includes USPTO assignment & status data published Nov 14, 2026 and grant & fee data published Nov 10, 2026 (weekly) · how we know
Notable: the highest-ranked patents in this portfolio by citations and family size. Fee due within 90 days: a maintenance fee is due within 90 days of when this page was computed and not yet paid.
Notable patents
Ranked by citations and family size, against patents of the same kind granted the same year. How we rank
Notable
Ends Mar 2039 · High confidence
Also notable
Ends Aug 2032 · High confidence
Also notable
Ends Jan 2034 · High confidence
Top Plate for Semiconductor Manufacturaing Equipment
US D1,016,761
Cited by 11 later US patents, top 10% of design patents granted in 2024 in our data. Protection runs to 2039.
Multi Charged Particle Beam Writing Apparatus and Multi Charged Particle Beam Writing Method
US 8,710,467
Renewed at every maintenance window since the 2014 grant; no more fees are due before its term ends in 2032.
Charged Particle Beam Writing Apparatus, Method of Adjusting Beam Incident Angle to Target Object Surface, and Charged Particle Beam Writing Method
US 9,236,223
Granted 2016 and renewed at every maintenance window due so far. Protection runs to 2034.
Fee deadlines
Maintenance fees fall due 3.5, 7.5 and 11.5 years after grant. A missed fee ends a patent at the end of the six month grace period that follows, not on the due date.
- 3 fees due Nov 14 to 30, 2026 · next Nov 14
- 4 fees due Dec 11 to 27, 2026 · next Dec 11
- 14 fees due Jan 2 to 28, 2027 · next Jan 2
- 11 fees due Feb 6 to 28, 2027 · next Feb 6
- 15 fees due Mar 1 to 29, 2027 · next Mar 1
- 16 fees due Apr 3 to 30, 2027 · next Apr 3
- 17 fees due May 5 to 26, 2027 · next May 5
- 15 fees due Jun 1 to 29, 2027 · next Jun 1
- 7 fees due Jul 5 to 21, 2027 · next Jul 5
- 13 fees due Aug 2 to 27, 2027 · next Aug 2
- 16 fees due Sep 1 to 30, 2027 · next Sep 1
- 7 fees due Oct 14 to 28, 2027 · next Oct 14
- 4 fees due Nov 3 to 10, 2027 · next Nov 3
Recent changes
- 7 of the patents on this record were granted since Aug 16, 2026
- 8 terms have ended since Aug 16, 2026
What they patent
The 5 largest of its 585 families, grouped by real patent family and labeled by the earliest filing in each. No technology classification is inferred from titles.
Patents held now
Soonest term end first.
| Patent | Title | Status | Expires | Confidence |
|---|---|---|---|---|
| US 7,463,173 | Charged Particle Beam Apparatus, Abnormality Detecting Method for Da Converter Unit, Charged Particle Beam Writing Method, and Mask In force · High confidence | In force | High confidence | |
| US 7,485,879 | Electron Beam Writing Apparatus and Writing Method In force · High confidence | In force | High confidence | |
| US 7,476,881 | Charged Beam Drawing Apparatus and Charged Beam Drawing Method In force · High confidence | In force | High confidence | |
| US 7,564,049 | Pattern Drawing System, Electrically Charged Beam Drawing Method, Photomask Manufacturing Method, and Semiconductor Device Manufacturing Method In force · High confidence | In force | High confidence | |
| US 7,601,968 | Charged Particle Beam Writing Method and Apparatus In force · High confidence | In force | High confidence | |
| US 7,495,248 | Position Detecting Apparatus and Position Detecting Method In force · High confidence | In force | High confidence | |
| US 7,495,243 | Writing Method of Charged Particle Beam, Support Apparatus of Charged Particle Beam Writing Apparatus, Writing Data Generating Method and Program-Recorded Readable Recording Medium In force · High confidence | In force | High confidence | |
| US 7,504,645 | Method of Forming Pattern Writing Data by Using Charged Particle Beam In force · High confidence | In force | High confidence | |
| US 7,679,068 | Method of Calculating Deflection Aberration Correcting Voltage and Charged Particle Beam Writing Method In force · High confidence | In force | High confidence | |
| US 7,525,110 | Multiple Irradiation Effect-Corrected Dose Determination Technique for Charged Particle Beam Lithography In force · High confidence | In force | High confidence |
Also on record, not counted in the 619: 7 patents in force now held by others · 135 patents ended · 106 applications pending · 132 applications abandoned. List them
Sources and methods
Compiled from USPTO application file histories, grants and recorded assignments, with the company's own names reviewed by hand. How this record was built
Portfolio grouped automatically from ownership conveyances to the names matched to this company, usually every name that begins with its own, so it counts patents an affiliate holds; each list row names the holder of record. Security interests are excluded and ambiguous records are not reviewed by hand.
Fee due within 90 days marks a patent with a maintenance fee due within 90 days of the date this page was computed and not yet recorded paid, so it can end earlier than the bar shows. A fee left unpaid ends the patent at the close of the six month grace period that follows its due date, not on the due date itself. It is not a prediction that the fee will be missed.
Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.