Maintenance fees coming due

Nuflare Technology, Inc.

141 maintenance fees come due in the 12 months from Nov 15, 2026, the next on Nov 19, 2026. Unpaid by May 19, 2027, that one lapses early.

A maintenance fee does not end a patent on its due date. It falls due at 3.5, 7.5 and 11.5 years from grant, and the patent lapses only if the fee is still unpaid at the end of the six month grace period that follows.

Patent	Title	Holder	Status	Fee due	Lapses if unpaid	Expires	Confidence
US 9,036,896	Inspection System and Method for Inspecting Line Width And/Or Positional Errors of a Pattern Nuflare Technology, Inc. In force Fee due Nov 19, 2026 Lapses if unpaid May 19, 2027 Term ends Sep 14, 2032 · High confidence	Nuflare Technology, Inc.	In force	Nov 19, 2026	May 19, 2027	Term ends Sep 14, 2032	High confidence
US 11,664,191	Electron Beam Irradiation Apparatus and Electron Beam Irradiation Method Nuflare Technology, Inc. In force Fee due Nov 30, 2026 Lapses if unpaid Jun 1, 2027 Term ends Dec 10, 2041 · High confidence	Nuflare Technology, Inc.	In force	Nov 30, 2026	Jun 1, 2027	Term ends Dec 10, 2041	High confidence
US 10,319,564	Multi Charged Particle Beam Writing Apparatus, and Multi Charged Particle Beam Writing Method Nuflare Technology, Inc. In force Fee due Dec 11, 2026 Lapses if unpaid Jun 11, 2027 Term ends Oct 23, 2037 · High confidence	Nuflare Technology, Inc.	In force	Dec 11, 2026	Jun 11, 2027	Term ends Oct 23, 2037	High confidence
US 10,325,755	Charged Particle Beam Lithography Apparatus and Charged Particle Beam Lithography Method Nuflare Technology, Inc. In force Fee due Dec 18, 2026 Lapses if unpaid Jun 21, 2027 Term ends Jan 8, 2038 · High confidence	Nuflare Technology, Inc.	In force	Dec 18, 2026	Jun 21, 2027	Term ends Jan 8, 2038	High confidence
US 9,063,440	Charged Particle Beam Writing Apparatus and Charged Particle Beam Writing Method Nuflare Technology, Inc. In force Fee due Dec 23, 2026 Lapses if unpaid Jun 23, 2027 Term ends Mar 29, 2032 · High confidence	Nuflare Technology, Inc.	In force	Dec 23, 2026	Jun 23, 2027	Term ends Mar 29, 2032	High confidence
US 11,688,058	Pattern Inspection Apparatus and Pattern Inspection Method Nuflare Technology, Inc. In force Fee due Dec 27, 2026 Lapses if unpaid Jun 28, 2027 Term ends Dec 17, 2041 · High confidence	Nuflare Technology, Inc.	In force	Dec 27, 2026	Jun 28, 2027	Term ends Dec 17, 2041	High confidence
US 10,340,120	Blanking Aperture Array, Method for Manufacturing Blanking Aperture Array, and Multi-Charged Particle Beam Writing Apparatus Nuflare Technology, Inc. In force Fee due Jan 2, 2027 Lapses if unpaid Jul 2, 2027 Term ends Jul 5, 2037 · High confidence	Nuflare Technology, Inc.	In force	Jan 2, 2027	Jul 2, 2027	Term ends Jul 5, 2037	High confidence
US 11,694,868	Multi-Beam Image Acquisition Apparatus and Multi-Beam Image Acquisition Method Nuflare Technology, Inc. In force Fee due Jan 4, 2027 Lapses if unpaid Jul 6, 2027 Term ends Jan 4, 2042 · High confidence	Nuflare Technology, Inc.	In force	Jan 4, 2027	Jul 6, 2027	Term ends Jan 4, 2042	High confidence
US 9,076,564	Multi Charged Particle Beam Writing Apparatus and Multi Charged Particle Beam Writing Method NuFlare Technology, Inc. In force Fee due Jan 7, 2027 Lapses if unpaid Jul 7, 2027 Term ends Dec 6, 2032 · High confidence	NuFlare Technology, Inc.	In force	Jan 7, 2027	Jul 7, 2027	Term ends Dec 6, 2032	High confidence
US 10,345,724	Position Correction Method of Stage Mechanism and Charged Particle Beam Lithography Apparatus Nuflare Technology, Inc. In force Fee due Jan 9, 2027 Lapses if unpaid Jul 9, 2027 Term ends Dec 7, 2037 · High confidence	Nuflare Technology, Inc.	In force	Jan 9, 2027	Jul 9, 2027	Term ends Dec 7, 2037	High confidence
131 more maintenance fees coming due in the 12 months from Nov 15, 2026 · Pro

10 of 141 patents shown. Soonest fee due date first, then patent number.

Pro members see every patent with a maintenance fee coming due: number, title, status, the due date, and the date it lapses if the fee goes unpaid through the grace period.

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Computed patent terms end on the dates shown. Related patents and pending applications may cover overlapping subject matter.